{"id":2518,"date":"2022-02-18T16:13:39","date_gmt":"2022-02-18T08:13:39","guid":{"rendered":"https:\/\/orisys.hkust.edu.hk\/?p=2518"},"modified":"2022-02-18T16:20:20","modified_gmt":"2022-02-18T08:20:20","slug":"paper-a-flexible-thermal-flow-sensor-is-now-published","status":"publish","type":"post","link":"https:\/\/orisys.hkust.edu.hk\/?p=2518","title":{"rendered":"Paper &#8221;A Flexible Thermal Flow Sensor&#8221; is published on IEEE 35th conference on MEMS!"},"content":{"rendered":"<p>[vc_section][vc_row][vc_column][vc_column_text]<\/p>\n<h3>For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 \u00b5m) integrated with a flexible silicone substrate with a cavity.<\/h3>\n<h3>Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit&#8217;s simplicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV\/m\/s) and sensor with a non-suspended structure (13.7 mV\/m\/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV\/m\/s.<\/h3>\n<h3>Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.<\/h3>\n<p>More information: <a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/9699452\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/9699452<\/a>[\/vc_column_text][\/vc_column][\/vc_row][\/vc_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>[vc_section][vc_row][vc_column][vc_column_text] For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 \u00b5m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2519,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[2],"tags":[],"_links":{"self":[{"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/posts\/2518"}],"collection":[{"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2518"}],"version-history":[{"count":3,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/posts\/2518\/revisions"}],"predecessor-version":[{"id":2522,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/posts\/2518\/revisions\/2522"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=\/wp\/v2\/media\/2519"}],"wp:attachment":[{"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2518"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=2518"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/orisys.hkust.edu.hk\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=2518"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}