Inertial sensors (e.g. accelerometer) are widely used in consumer electronics (e.g. smartphones), aerospace (e.g. drones), automotive (e.g. airbag ejection) and other industries. Most of them are Microelectromechanical Systems (MEMS), a tiny mass-spring device. They are small, cheap compared to the large machined sensor but the performance is compromised due to their small proof-mass and capacitive measuring mechanism.
Therefore, we are developing the electrochemical fluid-filled inertial sensor that has no moving parts, a large liquid proof-mass, a good signal-to-noise ratio, and low power consumption. It will be an ideal complement to the existing MEMS targeting low frequency, low cost and high-performance sensing.
So far, the electrochemical tilt sensor has demonstrated a resolution better than the existing MEMS tilt sensor. Also, the accelerometer and gyroscope utilizing the electrochemical sensing mechanism are under development.
Published paper link: https://ieeexplore.ieee.org/abstract/document/9505693?casa_token=6X5GeF3-z5UAAAAA:wKKkLDWejd9cFgOccIYwyZvbrxjNOXtbg8D5qOHyDp-NN4i9iujyj2lS-W8vzlDYah7b9xmX
